Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058628 | Substrate processing apparatus and method | Noah Bareket | 2011-11-15 |
| 7897942 | Dynamic tracking of wafer motion and distortion during lithography | Noah Bareket | 2011-03-01 |