Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012314 | Manufacturing method and apparatus of phase shift mask blank | Hideaki Mitsui | 2011-09-06 |
| 7989122 | Photomask blank, photomask, and methods of manufacturing the same | — | 2011-08-02 |
| 7955762 | Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film | Yuki Shiota | 2011-06-07 |
| 7935461 | Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask blank | Masahiro Hashimoto | 2011-05-03 |
| 7862963 | Halftone type phase shift mask blank and phase shift mask thereof | Yuuki Shiota, Hideaki Mitsui | 2011-01-04 |