Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7862963 | Halftone type phase shift mask blank and phase shift mask thereof | Osamu Nozawa, Hideaki Mitsui | 2011-01-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7862963 | Halftone type phase shift mask blank and phase shift mask thereof | Osamu Nozawa, Hideaki Mitsui | 2011-01-04 |