Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048594 | Photomask blank, photomask, and methods of manufacturing the same | Masahiro Hashimoto | 2011-11-01 |
| 8021806 | Photomask blank, photomask, and methods of manufacturing the same | Masahiro Hashimoto | 2011-09-20 |
| 8012314 | Manufacturing method and apparatus of phase shift mask blank | Osamu Nozawa | 2011-09-06 |
| 7862963 | Halftone type phase shift mask blank and phase shift mask thereof | Yuuki Shiota, Osamu Nozawa | 2011-01-04 |