Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048594 | Photomask blank, photomask, and methods of manufacturing the same | Hideaki Mitsui | 2011-11-01 |
| 8029948 | Photomask blank, photomask, and methods of manufacturing the same | Hiroyuki Iwashita, Atsushi Kominato | 2011-10-04 |
| 8026024 | Mask blank and method for manufacturing transfer mask | — | 2011-09-27 |
| 8021806 | Photomask blank, photomask, and methods of manufacturing the same | Hideaki Mitsui | 2011-09-20 |
| 7972750 | Mask blank and mask | — | 2011-07-05 |
| 7935461 | Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask blank | Osamu Nozawa | 2011-05-03 |