Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043771 | Phase shift mask blank and method of manufacturing phase shift mask | Toshiyuki Suzuki, Yasushi Okubo | 2011-10-25 |
| 8029948 | Photomask blank, photomask, and methods of manufacturing the same | Masahiro Hashimoto, Hiroyuki Iwashita | 2011-10-04 |