Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981573 | Reflective mask blank, reflective mask and methods of producing the mask blank and the mask | Shinichi Ishibashi, Tsutomu Shoki, Morio Hosoya, Mitsuhiro Kureishi | 2011-07-19 |
| 7955762 | Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film | Osamu Nozawa | 2011-06-07 |