Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8081384 | Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask | Takeyuki Yamada, Akira Ikeda | 2011-12-20 |
| 8021807 | Reflective mask blank and method of producing the same, and method of producing a reflective mask | — | 2011-09-20 |
| 7981573 | Reflective mask blank, reflective mask and methods of producing the mask blank and the mask | Shinichi Ishibashi, Tsutomu Shoki, Yuki Shiota, Mitsuhiro Kureishi | 2011-07-19 |