Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8081384 | Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask | Morio Hosoya, Akira Ikeda | 2011-12-20 |
| 7901842 | Photomask blank and method of producing the same, method of producing photomask, and method of producing semiconductor device | Yasushi Okubo, Masao Ushida, Hiroyuki Iwashita | 2011-03-08 |