Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7901842 | Photomask blank and method of producing the same, method of producing photomask, and method of producing semiconductor device | Takeyuki Yamada, Yasushi Okubo, Hiroyuki Iwashita | 2011-03-08 |