Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981573 | Reflective mask blank, reflective mask and methods of producing the mask blank and the mask | Shinichi Ishibashi, Tsutomu Shoki, Morio Hosoya, Yuki Shiota | 2011-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981573 | Reflective mask blank, reflective mask and methods of producing the mask blank and the mask | Shinichi Ishibashi, Tsutomu Shoki, Morio Hosoya, Yuki Shiota | 2011-07-19 |