Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064681 | Method and apparatus for inspecting reticle | Nobuhiro Okai, Shinji Okazaki, Yasunari Sohda | 2011-11-22 |
| 7952083 | Ion beam system and machining method | Hiroyasu Shichi, Muneyuki Fukuda, Masaki Hasegawa, Satoshi Tomimatsu | 2011-05-31 |
| 7947964 | Charged particle beam orbit corrector and charged particle beam apparatus | Hiroyuki Ito, Yuko Sasaki, Tohru Ishitani | 2011-05-24 |
| 7943903 | Defect inspection method and its system | Shinji Okazaki, Shoji Hotta, Yasunari Sohda | 2011-05-17 |
| 7875850 | Standard component for calibration and electron-beam system using the same | Yasunari Sohda, Keiichiro Hitomi | 2011-01-25 |