Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064681 | Method and apparatus for inspecting reticle | Shinji Okazaki, Yasunari Sohda, Yoshinori Nakayama | 2011-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064681 | Method and apparatus for inspecting reticle | Shinji Okazaki, Yasunari Sohda, Yoshinori Nakayama | 2011-11-22 |