Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064681 | Method and apparatus for inspecting reticle | Nobuhiro Okai, Yasunari Sohda, Yoshinori Nakayama | 2011-11-22 |
| 7943903 | Defect inspection method and its system | Shoji Hotta, Yasunari Sohda, Yoshinori Nakayama | 2011-05-17 |
| 7884325 | Electron beam measurement apparatus | Yasunari Sohda, Shoji Hotta, Muneyuki Fukuda | 2011-02-08 |