Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064681 | Method and apparatus for inspecting reticle | Nobuhiro Okai, Shinji Okazaki, Yoshinori Nakayama | 2011-11-22 |
| 7943903 | Defect inspection method and its system | Shinji Okazaki, Shoji Hotta, Yoshinori Nakayama | 2011-05-17 |
| 7884325 | Electron beam measurement apparatus | Shoji Hotta, Shinji Okazaki, Muneyuki Fukuda | 2011-02-08 |
| 7875850 | Standard component for calibration and electron-beam system using the same | Yoshinori Nakayama, Keiichiro Hitomi | 2011-01-25 |