Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084369 | Producing method of semiconductor device and substrate processing apparatus | Takashi Ozaki, Kazuhiro Yuasa | 2011-12-27 |
| 8057599 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Hiroshi Unami, Shinya Morita, Yoshikazu Takashima +1 more | 2011-11-15 |
| 8043431 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Hiroshi Unami, Shinya Morita, Yoshikazu Takashima +1 more | 2011-10-25 |
| 7883581 | Substrate processing apparatus and method of manufacturing semiconductor device | Naoharu Nakaiso, Masayuki Yamada | 2011-02-08 |
| 7879400 | Substrate processing apparatus, method of manufacturing a semiconductor device, and method of forming a thin film on metal surface | Takahiro Maeda, Takashi Ozaki | 2011-02-01 |
| 7871938 | Producing method of semiconductor device and substrate processing apparatus | Takashi Ozaki, Kazuhiro Yuasa | 2011-01-18 |