Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7914877 | Ceramic thin plate member | Makoto Ohmori, Natsumi Shimogawa, Tsutomu Nanataki | 2011-03-29 |
| 7879400 | Substrate processing apparatus, method of manufacturing a semiconductor device, and method of forming a thin film on metal surface | Kiyohiko Maeda, Takashi Ozaki | 2011-02-01 |