Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076615 | Substrate processing apparatus and method of manufacturing semiconductor device | Koichi Sada, Takayuki Nakada, Tomoyuki Matsuda | 2011-12-13 |
| 8057599 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Hiroshi Unami, Kiyohiko Maeda, Yoshikazu Takashima +1 more | 2011-11-15 |
| 8043431 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Hiroshi Unami, Kiyohiko Maeda, Yoshikazu Takashima +1 more | 2011-10-25 |
| 7893783 | Resonator, oscillator, and communication apparatus | Akira Akiba | 2011-02-22 |
| 7889017 | Resonator, oscillator and communication device | Akira Akiba | 2011-02-15 |