Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057599 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Kiyohiko Maeda, Shinya Morita, Yoshikazu Takashima +1 more | 2011-11-15 |
| 8043431 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Kiyohiko Maeda, Shinya Morita, Yoshikazu Takashima +1 more | 2011-10-25 |