Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084369 | Producing method of semiconductor device and substrate processing apparatus | Takashi Ozaki, Kiyohiko Maeda | 2011-12-27 |
| 8003411 | Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor device | Kazuhiro Kimura, Yasuhiro Megawa | 2011-08-23 |
| 7871938 | Producing method of semiconductor device and substrate processing apparatus | Takashi Ozaki, Kiyohiko Maeda | 2011-01-18 |