Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062473 | Plasma processing apparatus and method | Ryoji Nishio, Ken Yoshioka, Saburou Kanai, Tadamitsu Kanekiyo, Koji Okuda | 2011-11-22 |
| 7976632 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Minoru Soraoka, Susumu Tauchi | 2011-07-12 |
| 7947189 | Vacuum processing apparatus and vacuum processing method of sample | Tooru Aramaki, Tsunehiko Tsubone, Tadamitsu Kanekiyo, Shigeru Shirayone | 2011-05-24 |