Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947189 | Vacuum processing apparatus and vacuum processing method of sample | Tsunehiko Tsubone, Tadamitsu Kanekiyo, Shigeru Shirayone, Hideki Kihara | 2011-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947189 | Vacuum processing apparatus and vacuum processing method of sample | Tsunehiko Tsubone, Tadamitsu Kanekiyo, Shigeru Shirayone, Hideki Kihara | 2011-05-24 |