Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075733 | Plasma processing apparatus | Seiichi Watanabe, Naoki Yasui, Yasuhiro Nishimori | 2011-12-13 |
| 7976632 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara | 2011-07-12 |