Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075733 | Plasma processing apparatus | Seiichi Watanabe, Naoki Yasui, Susumu Tauchi | 2011-12-13 |
| 7909933 | Plasma processing method | Masunori Ishihara, Masamichi Sakaguchi, Yutaka Kudou, Satoshi Une | 2011-03-22 |