Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7913646 | Vacuum processing apparatus and vacuum processing method | Ken Kitaoka, Kazue Takahasi | 2011-03-29 |
| 7909933 | Plasma processing method | Masunori Ishihara, Yasuhiro Nishimori, Yutaka Kudou, Satoshi Une | 2011-03-22 |