Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083889 | Apparatus and method for plasma etching | Go Miya, Manabu Edamura, Ryoji Nishio | 2011-12-27 |
| 8062473 | Plasma processing apparatus and method | Ryoji Nishio, Saburou Kanai, Tadamitsu Kanekiyo, Hideki Kihara, Koji Okuda | 2011-11-22 |