Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083889 | Apparatus and method for plasma etching | Manabu Edamura, Ken Yoshioka, Ryoji Nishio | 2011-12-27 |
| 7887669 | Vacuum processing apparatus | Kouhei Satou, Hiroshi Akiyama | 2011-02-15 |