Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083889 | Apparatus and method for plasma etching | Go Miya, Manabu Edamura, Ken Yoshioka | 2011-12-27 |
| 8062473 | Plasma processing apparatus and method | Ken Yoshioka, Saburou Kanai, Tadamitsu Kanekiyo, Hideki Kihara, Koji Okuda | 2011-11-22 |
| 8057634 | Method and apparatus for plasma processing | Tadamitsu Kanekiyo, Yoshiyuki Oota, Tsuyoshi Matsumoto | 2011-11-15 |
| 7892444 | Plasma processing apparatus and method for controlling the same | — | 2011-02-22 |