Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068662 | Method and system for determining a defect during charged particle beam inspection of a sample | Zhao-Li Zhang, Wei Fang | 2011-11-29 |
| 8055059 | Method and system for determining a defect during sample inspection involving charged particle beam imaging | Wei Fang | 2011-11-08 |
| 8050490 | Method for inspecting overlay shift defect during semiconductor manufacturing and apparatus thereof | Hong Xiao, Wei Fang | 2011-11-01 |
| 8010307 | In-line overlay measurement using charged particle beam system | Wei Fang, Hong Xiao | 2011-08-30 |
| 7973283 | Method for regulating scanning sample surface charge in continuous and leap-and-scan scanning mode imaging process | Joe Wang | 2011-07-05 |
| 7919760 | Operation stage for wafer edge inspection and review | Hong Xiao, Joe Wang, Zhongwei Chen, Yi Wang, Edward Tseng | 2011-04-05 |
| 7884334 | Charged particle beam imaging method and system thereof | Yan Zhao | 2011-02-08 |