Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068662 | Method and system for determining a defect during charged particle beam inspection of a sample | Zhao-Li Zhang, Jack Jau | 2011-11-29 |
| 8055059 | Method and system for determining a defect during sample inspection involving charged particle beam imaging | Jack Jau | 2011-11-08 |
| 8050490 | Method for inspecting overlay shift defect during semiconductor manufacturing and apparatus thereof | Hong Xiao, Jack Jau | 2011-11-01 |
| 8010307 | In-line overlay measurement using charged particle beam system | Jack Jau, Hong Xiao | 2011-08-30 |