Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7973283 | Method for regulating scanning sample surface charge in continuous and leap-and-scan scanning mode imaging process | Jack Jau | 2011-07-05 |
| 7960697 | Electron beam apparatus | Zhongwei Chen, Weiming Ren, Xuedong Liu, Juying Dou, Fumin He +5 more | 2011-06-14 |
| 7928383 | Charged particle system including segmented detection elements | Xu Zhang, Zhong-Wei Chen | 2011-04-19 |
| 7919760 | Operation stage for wafer edge inspection and review | Jack Jau, Hong Xiao, Zhongwei Chen, Yi Wang, Edward Tseng | 2011-04-05 |
| 7872236 | Charged particle detection devices | Xu Zhang, Zhong-Wei Chen | 2011-01-18 |