Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070925 | Physical vapor deposition reactor with circularly symmetric RF feed and DC feed to the sputter target | Daniel J. Hoffman, Ying Rui, John Pipitone, Lara Hawrylchak | 2011-12-06 |
| 8062484 | Method for plasma-enhanced physical vapor deposition of copper with RF source power applied to the target | John Pipitone, Vineet Haresh Mehta | 2011-11-22 |
| 7907384 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Semyon Sherstinsky, Wei Wang, Cheng-Hsiung Tsai, Vineet Haresh Mehta, Allen Lau +1 more | 2011-03-15 |