Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7907384 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Karl M. Brown, Wei Wang, Cheng-Hsiung Tsai, Vineet Haresh Mehta, Allen Lau +1 more | 2011-03-15 |