Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999696 | On-line web accessed energy meter | Erran Kagan | 2011-08-16 |
| 7942969 | Substrate cleaning chamber and components | Martin Lee Riker | 2011-05-17 |
| 7907384 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Karl M. Brown, Semyon Sherstinsky, Cheng-Hsiung Tsai, Vineet Haresh Mehta, Allen Lau +1 more | 2011-03-15 |