Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048797 | Multilayer low reflectivity hard mask and process therefor | Anna M. Minvielle, Marina V. Plat, Hirokazu Tokuno | 2011-11-01 |
| 7977797 | Integrated circuit with contact region and multiple etch stop insulation layer | Wenmei Li, Angela T. Hui, Dawn Hopper | 2011-07-12 |
| 7888269 | Triple layer anti-reflective hard mask | Hirokazu Tokuno, David Matsumoto, Christopher H. Raeder, Christopher Foster, Weidong Qian +1 more | 2011-02-15 |