Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7888269 | Triple layer anti-reflective hard mask | Kouros Ghandehari, Hirokazu Tokuno, David Matsumoto, Christopher Foster, Weidong Qian +1 more | 2011-02-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7888269 | Triple layer anti-reflective hard mask | Kouros Ghandehari, Hirokazu Tokuno, David Matsumoto, Christopher Foster, Weidong Qian +1 more | 2011-02-15 |