Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972962 | Planarization method using hybrid oxide and polysilicon CMP | Vidyut Gopal | 2011-07-05 |
| 7888269 | Triple layer anti-reflective hard mask | Kouros Ghandehari, Hirokazu Tokuno, Christopher H. Raeder, Christopher Foster, Weidong Qian +1 more | 2011-02-15 |