Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048797 | Multilayer low reflectivity hard mask and process therefor | Kouros Ghandehari, Marina V. Plat, Hirokazu Tokuno | 2011-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048797 | Multilayer low reflectivity hard mask and process therefor | Kouros Ghandehari, Marina V. Plat, Hirokazu Tokuno | 2011-11-01 |