Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058081 | Method of testing an integrity of a material layer in a semiconductor structure | Moritz Andreas Meyer, Eckhard Langer | 2011-11-15 |
| 8053354 | Reduced wafer warpage in semiconductors by stress engineering in the metallization system | Matthias Lehr, Joerg Hohage | 2011-11-08 |
| 8039400 | Reducing contamination of semiconductor substrates during BEOL processing by performing a deposition/etch cycle during barrier deposition | Matthias Lehr, Holger Schuehrer | 2011-10-18 |