MM

Masateru Morikawa

TL Tokyo Electron Limited: 4 patents #12 of 433Top 3%
📍 Misato, JP: #1 of 7 inventorsTop 15%
Overall (2005): #10,803 of 245,428Top 5%
4
Patents 2005

Issued Patents 2005

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
6936107 Coating film forming apparatus and coating unit Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more 2005-08-30
6933015 Method of forming film Takahiro Kitano, Shinji Kobayashi, Yukihiko Esaki 2005-08-23
6872256 Film forming unit Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more 2005-03-29
6860945 Substrate coating unit and substrate coating method Shinji Kobayashi, Takahiro Kitano, Kazuhiro Takeshita, Yoshiyuki Kawafuchi 2005-03-01