YK

Yoshiyuki Kawafuchi

TL Tokyo Electron Limited: 2 patents #52 of 433Top 15%
Overall (2005): #28,199 of 245,428Top 15%
2
Patents 2005

Issued Patents 2005

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6932868 Coating film forming apparatus Takahiro Kitano, Norihisa Koga, Toshichika Takei 2005-08-23
6860945 Substrate coating unit and substrate coating method Shinji Kobayashi, Takahiro Kitano, Masateru Morikawa, Kazuhiro Takeshita 2005-03-01