Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936107 | Coating film forming apparatus and coating unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2005-08-30 |
| 6872256 | Film forming unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2005-03-29 |
| 6860945 | Substrate coating unit and substrate coating method | Shinji Kobayashi, Takahiro Kitano, Masateru Morikawa, Yoshiyuki Kawafuchi | 2005-03-01 |