YE

Yukihiko Esaki

TL Tokyo Electron Limited: 3 patents #22 of 433Top 6%
Overall (2005): #14,196 of 245,428Top 6%
3
Patents 2005

Issued Patents 2005

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6936107 Coating film forming apparatus and coating unit Takahiro Kitano, Masateru Morikawa, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more 2005-08-30
6933015 Method of forming film Takahiro Kitano, Shinji Kobayashi, Masateru Morikawa 2005-08-23
6872256 Film forming unit Takahiro Kitano, Masateru Morikawa, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more 2005-03-29