Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6906511 | Magnetic position detection for micro machined optical element | — | 2005-06-14 |
| 6891988 | Magnetic position detection apparatus for micro machined optical element | — | 2005-05-10 |
| 6888979 | MEMS mirrors with precision clamping mechanism | Behrang Behin, Michael Julian Daneman, Chuang-Chia Lin, Boris Kobrin, Gary M. Zalewski | 2005-05-03 |