Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962830 | Global mechanical stop | Kam-Yin Lau, Richard S. Muller | 2005-11-08 |
| 6897539 | Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam | Kam-Yin Lau, Richard S. Muller | 2005-05-24 |
| 6887391 | Fabrication and controlled release of structures using etch-stop trenches | Michael Julian Daneman | 2005-05-03 |
| 6888979 | MEMS mirrors with precision clamping mechanism | Michael Julian Daneman, Chuang-Chia Lin, Boris Kobrin, Murali Chaparala, Gary M. Zalewski | 2005-05-03 |