Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887391 | Fabrication and controlled release of structures using etch-stop trenches | Behrang Behin | 2005-05-03 |
| 6888979 | MEMS mirrors with precision clamping mechanism | Behrang Behin, Chuang-Chia Lin, Boris Kobrin, Murali Chaparala, Gary M. Zalewski | 2005-05-03 |
| 6873756 | Tiling of optical MEMS devices | Timothy Beerling | 2005-03-29 |