Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6888979 | MEMS mirrors with precision clamping mechanism | Behrang Behin, Michael Julian Daneman, Boris Kobrin, Murali Chaparala, Gary M. Zalewski | 2005-05-03 |
| 6859577 | Self assembled micro anti-stiction structure | — | 2005-02-22 |