Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954275 | Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography | Byung-Jin Choi, Matthew E. Colburn, S. Sreenivasan, C. Grant Willson, Todd C. Bailey | 2005-10-11 |