Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980282 | Method for modulating shapes of substrates | Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, Norman E. Schumaker +1 more | 2005-12-27 |
| 6954275 | Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography | Byung-Jin Choi, Matthew E. Colburn, S. Sreenivasan, Todd C. Bailey, John Ekerdt | 2005-10-11 |