Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946397 | Chemical mechanical polishing process with reduced defects in a copper process | Chia-Che CHUNG, Chi-Wei Chung, Wen-Chih Chiou, Ying-Ho Chen, Syun-Ming Jang | 2005-09-20 |